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Bonded SOI
SOI substrate formed by bonding two silicon wafers with oxidised surfaces such that one wafer is formed with an oxide layer sandwiched between two layers of Si; one wafer is subsequently polished down to a specified thickness to form an active layer where devices will be fabricated.
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- Part of Speech: noun
- Synonym(s):
- Blossary:
- Industry/Domain: Semiconductors
- Category: Silicon wafer
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