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Slurry

A liquid containing suspended abrasive component; used for lapping, polishing and grinding of solid surfaces; can be chemically active; key element of CMP processes.

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slurry
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A mixture of water and such finely divided materials, such as Portland cement, slag, or soil in suspension.

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Semiconductors; Silicon wafer

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Deviation from a plane of a slice or wafer centerline containing both concave and convex regions.

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