Thermal oxidation, thermal oxide

Thermal oxidation, thermal oxide

Growth of oxide on the substrate through oxidation of the surface at elevated temperature; thermal oxidation of silicon results in a very high quality oxide, sio2; most other semiconductors do not form device quality thermal oxide, hence, "thermal oxidation" is almost synonymous with "thermal oxidation of silicon".

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Part of Speech: noun
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Industry/Domain: Semiconductors
Category: Silicon wafer
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thermal oxidation, thermal oxide

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