8 Terms
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Silicon wafer
A silicon wafer is a thin, circular slice of single-crystal semiconductor material used in manufacturing of semiconductor devices and integrated circuits.
Industry: Semiconductors
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Silicon wafer
Global flatness
Semiconductors; Silicon wafer
The TIR or the maximum FPD relative to a specified reference plane within the FQA.
Focal plane
Semiconductors; Silicon wafer
The plane perpendicular to the optical axis of an imaging system which contains the focal point of the imaging system.
Flatness
Semiconductors; Silicon wafer
For wafer surfaces, the deviation of the front surface, expressed in TIR or maximum FPD,relative to a specified reference plane when the back surface of the wafer is ideally flat, as when pulled down ...
Flat
Semiconductors; Silicon wafer
A portion of the periphery of a circular wafer that has been removed to a chord.
External, extrinsic gettering
Semiconductors; Silicon wafer
The process in which gettering of contaminants and defects in a semiconductor wafer is accomplished by stressing its back surface (by inducing damage or depositing material featuring different than ...
P-type semiconductor
Semiconductors; Silicon wafer
Semiconductor in which the concentration of holes is much higher than the concentration of electrons (n>>p); holes are majority carriers and dominate conductivity.
Primary flat
Semiconductors; Silicon wafer
The flat of longest length on the wafer, oriented such that the chord is parallel with a specified low index crystal plane; major flat.
