Silicon wafer

Silicon wafer

A silicon wafer is a thin, circular slice of single-crystal semiconductor material used in manufacturing of semiconductor devices and integrated circuits.

Industry: Semiconductors

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Silicon wafer

Polishing

Semiconductors; Silicon wafer

Process applied to either reduce roughness of the wafer surface or to remove excess material from the surface; typically polishing is a mechanical-chemical process using a chemically reactive slurry.

Point defect

Semiconductors; Silicon wafer

A localised crystal defect such as lattice vacancy,interstitial atom, or substitutional impurity. Contrast with light point defect.

Particle

Semiconductors; Silicon wafer

A small,discrete piece of foreign material or silicon not connected crystallography to the wafer.

Planar defect

Semiconductors; Silicon wafer

Also known as area defect; basically an array of dislocations, e.g. Grain boundaries,stacking faults.

Single-crystal

Semiconductors; Silicon wafer

Crystalline solid in which atoms are arranged following specific pattern throughout the entire piece of material; in general, single crystal material features superior electronic and photonic ...

Slicing

Semiconductors; Silicon wafer

Term refers to the process of cutting of the single-crystal ingot into wafers; high precision diamond blades are used.

Single wafer process

Semiconductors; Silicon wafer

Only one wafer is processed at the time; tools that are designed specifically for single-wafer processing become more common as wafer diameter increases.