Home > Terms > English, UK (UE) > Hexamethyldisilizane (HMDS)
Hexamethyldisilizane (HMDS)
A material that mproves adhesion of photoresist to the surface of a wafer; especially designed for adhesion of photoresist to sio2; deposited on wafer surface immediately prior to deposition of resist.
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- Part of Speech: noun
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- Category: Silicon wafer
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