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Home > Terms > English, UK (UE) > Secondary ion mass spectrometry (SIMS)
Secondary ion mass spectrometry (SIMS)
A precision measurement technique used to quantitatively analyse the elements and isotopes of materials at microscopic scales (with a typical spatial resolution of 1 micrometer). A SIMS instrument is also called an ion microprobe.
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- Part of Speech: noun
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- Industry/Domain: Astronomy
- Category: Planetary science
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