Silicon wafer

Silicon wafer

A silicon wafer is a thin, circular slice of single-crystal semiconductor material used in manufacturing of semiconductor devices and integrated circuits.

Industry: Semiconductors

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Silicon wafer

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Semiconductors; Silicon wafer

The smallest perpendicular distance between two planes,both parallel with the reference plane, which encloses all points on the front surface of a wafer within the FQA, the site, or the subsite, ...

Thermal oxidation, thermal oxide

Growth of oxide on the substrate through oxidation of the surface at elevated temperature; thermal oxidation of silicon results in a very high quality oxide, sio2; most other semiconductors do not ...

Sputter deposition

Semiconductors; Silicon wafer

Bombardment of a solid (target) by high energy chemically inert ions (e.g. Ar+); causes ejection of atoms from the target which are then redeposited on the surface of a substrate purposely located in ...

Wafer fabrication

Semiconductors; Silicon wafer

Process in which single crystal semiconductor ingot is fabricated and transformed by cutting, grinding,polishing, and cleaning into a circular wafer with desired diameter and physical properties.

Warp

Semiconductors; Silicon wafer

Deviation from a plane of a slice or wafer centerline containing both concave and convex regions.

Wafer flat

Semiconductors; Silicon wafer

Flat area on the perimeter of the wafer; location and number of wafer flats contains information on crystal orientation of the wafer and the dopant type (n-type or p-type).