11 Terms
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Silicon wafer
A silicon wafer is a thin, circular slice of single-crystal semiconductor material used in manufacturing of semiconductor devices and integrated circuits.
Industry: Semiconductors
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Silicon wafer
Total indicator reading (TIR)
Semiconductors; Silicon wafer
The smallest perpendicular distance between two planes,both parallel with the reference plane, which encloses all points on the front surface of a wafer within the FQA, the site, or the subsite, ...
Thermal oxidation, thermal oxide
Semiconductors; Silicon wafer
Growth of oxide on the substrate through oxidation of the surface at elevated temperature; thermal oxidation of silicon results in a very high quality oxide, sio2; most other semiconductors do not ...
Sputter deposition
Semiconductors; Silicon wafer
Bombardment of a solid (target) by high energy chemically inert ions (e.g. Ar+); causes ejection of atoms from the target which are then redeposited on the surface of a substrate purposely located in ...
Wafer fabrication
Semiconductors; Silicon wafer
Process in which single crystal semiconductor ingot is fabricated and transformed by cutting, grinding,polishing, and cleaning into a circular wafer with desired diameter and physical properties.
Warp
Semiconductors; Silicon wafer
Deviation from a plane of a slice or wafer centerline containing both concave and convex regions.
Wafer flat
Semiconductors; Silicon wafer
Flat area on the perimeter of the wafer; location and number of wafer flats contains information on crystal orientation of the wafer and the dopant type (n-type or p-type).
Sputtering
Semiconductors; Silicon wafer
Bombardment of a solid (target) by high energy chemically inert ions (e.g. Ar+); causes ejection of atoms from the target which are then redeposited on the surface of a substrate purposely located in ...
