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Silicon wafer
A silicon wafer is a thin, circular slice of single-crystal semiconductor material used in manufacturing of semiconductor devices and integrated circuits.
Industry: Semiconductors
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Silicon wafer
Slurry
Semiconductors; Silicon wafer
A liquid containing suspended abrasive component; used for lapping, polishing and grinding of solid surfaces; can be chemically active; key element of CMP processes.
Silicon-on-sapphire (SOS)
Semiconductors; Silicon wafer
Special case of SOI where an active Si layer is formed on top of a sapphire substrate (an insulator)by means of epitaxial deposition; due to a slight lattice mismatch between Si and sapphire, Si ...
Slice orientation
Semiconductors; Silicon wafer
The angle between the surface of a slice and the growth plane of the crystal. The most common slice orientations are , and .
Silicon-on-insulator (SOI)
Semiconductors; Silicon wafer
Silicon substrate of choice in future generation CMOS ics; basically a silicon wafer with a thin layer of oxide (sio2) buried in it; devices are built into a layer of silicon on top of the buried ...
Smart cut
Semiconductors; Silicon wafer
Process used to fabricate bonded SOI substrates by cleaving the top wafer close to the desired thickness of the active layer. Before bonding, one wafer is implanted with hydrogen to a depth that will ...
Test grade
Semiconductors; Silicon wafer
A virgin silicon wafer of lower quality than Prime, and used primarily for testing processes. SEMI indicates the bulk, surface, and physical properties required to label silicon wafers as "Test ...
Target
Semiconductors; Silicon wafer
Source material used during evaporation or deposition; in sputtering, typically in the form of high purity disc; in e-Beam evaporation, typically in the form of a crucible. In thermal evaporation, ...
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