Home > Terms > English, UK (UE) > Silicon-on-sapphire (SOS)
Silicon-on-sapphire (SOS)
Special case of SOI where an active Si layer is formed on top of a sapphire substrate (an insulator)by means of epitaxial deposition; due to a slight lattice mismatch between Si and sapphire, Si epitaxial layers larger than the critical thickness have a high defect density.
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- Part of Speech: noun
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- Industry/Domain: Semiconductors
- Category: Silicon wafer
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