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Float-zone crystal growth
The method used to form single crystal semiconductor substrates (alternative to CZ);poly crystalline material is converted into single-crystal by locally melting the plane where a single crystal seed is contacting the poly crystalline material; used to make very pure, high resistance Si wafers; does not allow as large wafers (< 200mm) as CZ does; radial distribution of dopant in FZ wafer is not as uniform as in CZ wafer.
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- Part of Speech: noun
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- Industry/Domain: Semiconductors
- Category: Silicon wafer
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